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Manufacturing process for ultimate performance inertial MEMS Gyroscope (MUPIA)

Project

MUPIA - Manufacturing process for ultimate performance inertial MEMS Gyroscope (MUPIA)


Funding origin:
European
European Union
STRIA Roadmaps:
Vehicle design and manufacturing (VDM)
Vehicle design and manufacturing
Transport mode:
Airborne
Airbone
Transport sectors:
Passenger transport
Passenger transport
Freight transport
Freight transport
Project website:
Duration:
Start date: 01/03/2018,
End date: 01/05/2021

Status: Finished
Funding details:
Total cost:
€1 330 319
EU Contribution:
€1 235 723

Overview

Objectives:

The main objective of the MUPIA project is to demonstrate a cost-efficient manufacturing process for a high-end MEMS gyroscope for aerospace Applications. Both the sensor element and the packaging process is critical to achieve a precise, long term stable and reliable component. The consortium consists of SINTEF and Cerinnov, which together with sub suppliers cover both the necessary silicon MEMS processing and the high end ceramic packaging technology needed to reach the goal of the project.

SINTEF has worked with industrialisation of MEMS components since the 1960s. Despite being a research industry, SINTEF holds the certifications ISO 9001:2015, ISO 14001:2015 and OHSAS 18001:2007 and have a regular production of MEMS components for the petroleum, medical and aerospace industry. Cerinnov has expertise in laser processes for ablation and sintering. They will collaborate with a sub Suppliers with the development of the package for the gyroscope.

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